On the possibility of thin layers thickness determination with low energy proton scattering

The analysis of erosion and redeposition processes plays an important role in the physics of fusion devices. In this work we present the results of computer simulation of plasma-facing materials surface analysis by use of the keV-energy proton scattering spectroscopy. It is shown that this technique can be used for the non-destructive analysis of thin surface layers. Energy spectra that correspond to different scattering and target parameters are presented.