Low pressure RF discharge in electronegative gases for plasma processing

Abstract An RF plasma discharge in oxygen has been investigated both experimentally and theoretically. The excited species in the oxygen plasma were detected by means of spontaneous luminescence spectroscopy. A self-consistent numerical model was developed for these discharges. The model was confirmed by several theoretical and experimental investigations. The spatial distribution over the discharge gap of both charged and neutral plasma components and their fluxes to electrodes have been calculated.