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Comparative study of the viscoelasticity of parylene thin films for MEMS using Nano-DMA and Molecular Dynamics
Comparative study of the viscoelasticity of parylene thin films for MEMS using Nano-DMA and Molecular Dynamics
2017
Sui Wenshu
S Duvieusart Maxime
Zhao Junhua
Tai Yu-Chong
Lee Yi-Kuen
Keywords:
Nanotechnology
Thin film
Nano-
Parylene
Molecular dynamics
Microelectromechanical systems
Viscoelasticity
Engineering
Composite material
Materials science
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