A SiN-Si Dual-layer Directional Coupler

Jianbin Ma,Guangzhen Luo,Pengfei Wang,Ruiting Wang,Zhengxia Yang,Xuliang Zhou,Yejin Zhang,Jiaoqing Pan

A SiN-Si Dual-layer Directional Coupler

2020

Jianbin Ma
Guangzhen Luo
Pengfei Wang
Ruiting Wang
Zhengxia Yang
Xuliang Zhou
Yejin Zhang
Jiaoqing Pan

We proposed a SiN-Si dual-layer directional coupler, the coupler ratio achieved from 0% to 97%. It can be used to improve the performance of optical phased array (OPA) chip.

Keywords:

light intensity
Optoelectronics
high power lasers
Evanescent wave
Phased-array optics
Power dividers and directional couplers
Chip
dual layer
Materials science

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