Detector compact pressure, very precise and highly resistant to corrosion

2005 
Sensor (2) pressure mainly comprising a chip (21) detector, a circuit chip (30) and a substrate (40). The chip (21) sensor is arranged to produce an electrical signal representing a detected pressure and comprises a detection zone (23a) and plurality of contact pads (25a). The chip (30) circuit comprises circuitry arranged for processing the electrical signal and a plurality of contact pads (31a). The substrate (40) comprises a resin sheet (41) having an opening (43) and a plurality of conductors (42a) in the resin sheet (41). The substrate (40) is joined to the chip (21) sensor and the chip (30) so that the detection zone circuit (23a) on the chip (21) detector is intended to be exposed to the pressure detected through the opening (43) of the resin sheet (41), the contact pads (25a, 31a) of the chip (21) and sensor chip (30) circuit are electrically connected to the conductors (42a - 42d) of the substrate (40) and the contact pads (25a, 31a) and conductors (42a) are tightly embedded in the resin sheet (41) of the substrate (40).
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