The manufacture method of luminescent device

Disclose a kind of manufacture method of luminescent device, it comprises the steps: to be provided in the first crucible containing organic compound in evaporation source and the second crucible containing inorganic compound; Along direction of transfer, one base material is delivered into a film forming chamber, thus make this base material by the top of an evaporation guard shield, the top of this evaporation guard shield has at least one perforate, and described evaporation source is placed in the below of described evaporation guard shield; While being conducted through by this base material above this evaporation guard shield, heat the described organic compound in described evaporation source and inorganic compound, thus formation one deck contains the layer of described organic compound and inorganic compound on the substrate; This evaporation guard shield is heated in the process forming described layer; Described perforate has elongated shape, and its elongated direction arranges along the second direction vertical with described direction of transfer.