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Beam tuning parameter optimization by Neural Network on the NISSIN BeyEX medium current ion implanter
Beam tuning parameter optimization by Neural Network on the NISSIN BeyEX medium current ion implanter
2021
Shinya Takemura
Shigeki Sakai
Eiichi Murayama
Ayato Ejiri
Keywords:
Beam (structure)
Artificial neural network
Ion implantation
Materials science
Current (fluid)
Optoelectronics
Correction
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