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Designing high k dielectric films with LiPON-Al2O3 hybrid structure by atomic layer deposition
Designing high k dielectric films with LiPON-Al2O3 hybrid structure by atomic layer deposition
2021
Ze Feng
Yitong Wang
Jilong Hao
Meiyi Jing
Feng Lu
Wei-Hua Wang
Yahui Cheng
Shengkai Wang
Hui Liu
Dong Hong
Keywords:
Optoelectronics
High-κ dielectric
Atomic layer deposition
Materials science
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