Micromachining of chalcogenide waveguides by picosecond laser

Dun Mao,Mingkun Chen,Nathan Augenbraun,Anishkumar Soman,Xiangyu Ma,Thomas Kananen,Matthew F. Doty,Tingyi Gu

Micromachining of chalcogenide waveguides by picosecond laser

2019

Dun Mao
Mingkun Chen
Nathan Augenbraun
Anishkumar Soman
Xiangyu Ma
Thomas Kananen
Matthew F. Doty
Tingyi Gu

Direct laser inscription creates waveguide structures on chalcogenide thin film. Results of Ge2Sb2Te5 and Ge23Sb7Se70 are compared by varying laser powers and translation speeds.

Keywords:

Optoelectronics
Physics
Optics
Chalcogenide
Surface micromachining
Picosecond
Waveguide
Laser
Thin film
Germanium
optical testing
picosecond laser

Correction
Source
Cite
Save
Machine Reading By IdeaReader

References

Citations