Fast and robust RF characterization method of insulators used in high speed interconnects networks

A wide band (1 GHz–67 GHz) characterization method of insulator layers is presented. This method is well suitable for a fast, simple and accurate extraction of permittivity of insulators used in interconnects networks. Concerning losses, reto-simulations must be achieved to extract the loss tangent, due to the fact that the extraction of G/(C.ω) includes extrinsic effects. So both lossless and loss cases will be discussed. This non-destructive method and low-cost method presents strong advantages because no specific device under test, no metallic deposit and no etching are required. Measurements are performed using a coplanar GSG RF microprobe directly set down on the dielectric material to characterize.