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Influence of Ammonia Flow on Microstructural Properties of Polar GaN Layers Grown by HTVPE on Sapphire Substrates
Influence of Ammonia Flow on Microstructural Properties of Polar GaN Layers Grown by HTVPE on Sapphire Substrates
2018
M. Barchuk
Mykhaylo Motylenko
G. Lukin
Christian Röder
O. Pätzold
David Rafaja
Keywords:
Chemistry
Flow (psychology)
Inorganic chemistry
Chemical engineering
Gallium nitride
Sapphire
Polar
Ammonia
Residual stress
threading dislocations
Correction
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