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Helicon source as element of hybrid plasma system in facility for thin-film coating with controlled nanostructure
Helicon source as element of hybrid plasma system in facility for thin-film coating with controlled nanostructure
2016
K. V. Vavilin
E. A. Kralkina
P. A. Neklyudova
A. K. Petrov
A. M. Nikonov
V. B. Pavlov
A. Ayrapetov
V. V. Odinokov
G. Pavlov
V. Sologub
Keywords:
Optoelectronics
As element
Nanostructure
Thin film
Plasma
Coating
Helicon
Materials science
Analytical chemistry
Correction
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