Compatible with the CMOS BioFET

The present invention provides a biological field effect transistor (BioFET) and a method of making BioFET device. The method includes using a complementary metal oxide semiconductor (CMOS) process, or one or more process-compatible CMOS process steps to form unique BioFET. BioFET device may include: a substrate; a gate structure disposed on the first surface of the substrate; and an interface layer, formed on the second surface of the substrate. The interfacial layer may allow the recipient to be placed at the interface layer to detect the presence of biological entities or biological molecules. The present invention further provides the BioFET compatible CMOS.