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Measurement of incident molecular temperature in the formation of organic thin films
Measurement of incident molecular temperature in the formation of organic thin films
2017
Takahiro Abe
Yukihiro Ozaki
Munetaka Hayakawa
Akihumi Shimoyama
Takaaki Tanaka
Akira Tsuji
Yoshikazu Takahashi
Ryosuke Matsubara
Atsushi Kubono
Keywords:
Chemical vapor deposition
Thin film
Combustion chemical vapor deposition
Carbon film
Inorganic chemistry
Materials science
Chemical engineering
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