Method and apparatus for checking adaptability of hybrid ball
1994
PURPOSE: To make it possible to check a hybrid ball to be fitted promptly, by casting a light beam with a wavelength of λ to a hybrid ball through a transparent band member, obtaining a reflected signal from the ball, and determining the conformity of the ball. CONSTITUTION: A hybrid ball 9 on an electronic part or a face of a substrate 1 is checked to determine its conformity. In a step in this method, the hybrid ball 9 on the electronic part or the substrate 1 is put in position with respect to a transparent strip 19, through which a wavelength of λ passes. The strip 19 is flattened partly to provide the ball 9 with a flat part on the transparent strip 19, and a light beam with a wavelength of λ is cast through the transparent strip 19 to the hybrid ball 9. In addition, a reflected signal from the hybrid ball 9 to be checked is obtained so that the conformity of the hybrid ball 9 is determined on the basis of the reflected signals from each part of the hybrid ball 9.
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