Residual stress of Pb(ZrxTi1-x)O3 films with mixed textures

Abstract Pb(Zr x Ti 1− x )O 3 films with different Zr/Ti ratios were prepared on Pt/Ti/SiO 2 /Si substrate by sol–gel technique. By X-ray diffraction method, the residual stress of PZT films with texture was studied. The results show that there exist mixed textures with (1 1 1) and (1 0 0) textures in all the Pb(Zr x Ti 1− x )O 3 films. For the PZT films with mixed textures, residual compressive stress and tensile stress coexist in the films. The residual stress for (1 1 1)-oriented grains is compressive and that for (1 0 0)-oriented grains is tensile. The residual stress depends on both the lattice mismatch between the film and substrate and the spontaneous polarization direction of PZT films.