Mechanical structure composed of plurality of microstructure layers and its manufacture

PROBLEM TO BE SOLVED: To extensively apply the existing micromachine technology and thereby manufacture a machine which can perform a good job by forming a mechanical structure which includes a stack structure in which a plurality of layers are stacked and including movable member demarcated from a microstructure in at least one layer of the stack structure. SOLUTION: A pattern is formed on a substrate 12 using a mask and then a micromachine layer 10 is formed a microstructure constituted of a stator structure 16 and a rotor structure 18 which are demarcated by a hole 20 surrounding a hub 22 and a groove 14 is formed. The stator structures 16 and the rotor structures 18 are stacked to form an electrostatic motor of a stack structure constituted of a plurality of layers. By fabricating a machine by stacking, machines of micrometers, millimeters, and centimeters in size can be manufactured.