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Characterization of the silicon dioxide-silicon interface with the scanning capacitance microscope | NIST
Characterization of the silicon dioxide-silicon interface with the scanning capacitance microscope | NIST
2006
Joseph J. Kopanski
W.R. Thurber
Melissa Chun
Keywords:
NIST
Differential capacitance
Scanning capacitance microscopy
Capacitance
Microscope
Silicon dioxide
Analytical chemistry
Silicon
Materials science
Electronic engineering
Nanotechnology
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