System and process for recovering pure hydrogen and liquid HCl through polysilicon tail gas treatment
2011
The invention discloses a system for recovering pure hydrogen and liquid HCl through polysilicon tail gas treatment, and the system mainly comprises a tail gas circulated condensing and washing tower, a chlorosilane stripper and a HCl rectifying tower, wherein the tail gas circulated condensing and washing tower is equipped with a polysilicon tail gas inflow pipe, a first chlorosilane solution outflow pipe and a first hydrogen outflow pipe, and the first chlorosilane solution outflow pipe is connected with the chlorosilane stripper; the chlorosilane stripper is equipped with a reboiler, a second chlorosilane solution outflow pipe, a first HCl outflow pipe and a stripping backflow pipe, and the first HCl outflow pipe and the stripping backflow pipe are connected with the HCl rectifying tower; and the HCl rectifying tower is equipped with a condenser, a separator and a second HCl outflow pipe which are connected in turn, and the separator is equipped with a non-condensable gas outflow pipe. The invention also discloses a process for recovering pure hydrogen and liquid HCl through polysilicon tail gas treatment. Through the system and process disclosed by the invention, the polysilicon tail gas is turned into things of value, the resources are saved, and simultaneously the energy consumption during the treatment process is reduced.
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