Magnetron apparatus and method for pulsed operation of a magnetron device

The invention relates to an apparatus and method for pulsed operation of a magnetron within a vacuum chamber (11), wherein by means of at least one power supply means (14) an alternating voltage between at least two electrically isolated target (12; 13) is switched so that the two targets (12; 13) alternately as cathode and anode of a magnetron discharge between the two targets (12; 13) acting, wherein by means of a switch (16) at least one additional electrode (15) temporarily and repeatedly (as a anode of a magnetron discharge between the auxiliary electrode 15) and the acting as a cathode target (13) is switched.