Hf-related Gate Oxide Thickness Mapping Using XRR/XRF

Hf-related Gate Oxide Thickness Mapping Using XRR/XRF Richard Ortega, S. M. Baumann, R. S. Hockett, H. Murakami, V. Ramakrishnan 1 Evans Analytical Group LLC, 425 Round Rock West Drive, Suite 100, Round Rock, TX 78681 2 Evans Analytical Group LLC, 810 Kifer Road, Sunnyvale, CA 94086 3 Technos Co Ltd, 1-32-1 Nagao-Tanimachi, HirakataShi, Osaka 573-0164, Japan 4 Technos International Inc., 60 E. Rio Salado Parkway, Suite 900, Tempe, AZ 85281