Old Web
English
Sign In
Acemap
>
Paper
>
Microloading effect in ultrafine SiO[sub 2] hole/trench etching
Microloading effect in ultrafine SiO[sub 2] hole/trench etching
1999
Yannick Feurprier
Yasuhiko Chinzei
Masanobu Ogata
Takashi Kikuchi
M. Ozawa
Takanori Ichiki
Yasuhiro Horiike
Keywords:
Etching
Trench
Chemistry
Inorganic chemistry
Correction
Cite
Save
Machine Reading By IdeaReader
1
References
2
Citations
NaN
KQI
[]