Molecular basis of haemoglobinopathies and G6PD deficiency in the Comorian population.
2000
PCT No. PCT/DE93/00553 Sec. 371 Date May 10, 1995 Sec. 102(e) Date May 10, 1995 PCT Filed Jun. 24, 1993 PCT Pub. No. WO94/00876 PCT Pub. Date Jan. 6, 1994For the global planarization of a semiconductor circuit or a micromechanical component with a step between a higher-lying region and a lower-lying region, the regions being large in area, it is envisaged to deposit a first layer (50), remove it again in the higher-lying region apart from a rib (50), deposit a second layer (51) and then, in a CMP step, planarize the entire arrangement.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
11
References
16
Citations
NaN
KQI