Design, test and control of a compact piezoelectric scanner based on a compound compliant amplification mechanism

Abstract This paper presents the mechanical design, testing and control of a novel piezoelectric scanner to achieve high performance motion tracking. Based on both triangle amplification and differential principles, the scanner is designed with a compound compliant amplification mechanism (CCAM) to realize deflection motion. A strain-type piezoelectric actuator is adopted as the actuation and angle-sensing element for the scanner. Analytical calculations in terms of deflection range, sensor deployment and dynamics are derived, and then the finite element analysis and prototype tests are conducted to verify the analytical results. To facilitate precise angular tracking in front of the existing hysteresis effect, a terminal sliding mode control scheme is implemented for the performance improvement. Experimental results reveal that the developed scanner has an angle resolution of 1.5 μ rad, a motion range of ±0.16 mrad, and can achieve accurate angle tracking performance.