Study on wet-etching of PZT thin film

PZT thin films are promising materials for MEMS applications due to their good piezoelectric properties. In this paper, we investigated the mechanism of the PZT wet-etching and propose a modified wet-etching recipe (BHF:HCl:NH/sub 4/Cl:H/sub 2/O=1:2:4:4) to etch PZT thin films.