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A Transmission Electron Microscopy study of Fluorine implantation induced damage in Silicon
A Transmission Electron Microscopy study of Fluorine implantation induced damage in Silicon
2010
Huda El Mubarek
A. S. Gandy
H.A.W. El Mubarek
U Bangert
Keywords:
Radiochemistry
Fluorine
Transmission electron microscopy
Silicon
Materials science
Optoelectronics
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