Plasma density perturbation caused by probes at low gas pressure

An analysis of plasma parameter perturbations caused by a spherical probe immersed into a spherical plasma is presented for arbitrary collisionality and arbitrary ratios of probe to plasma dimensions. The plasma was modeled by the fluid plasma equations with ion inertia and nonlinear ion friction force that dominate plasma transport at low gas pressures. Significant depletion of the plasma density around the probe surface has been found. The area of plasma depletion coincides with the sensing area of different kinds of magnetic and microwave probes and will therefore lead to errors in data inferred from measurements with such probes.