Frequency Characteristics of 2-Layer Spiral Planar Inductor

Abstract In this study, we propose that the structures of 2-layer spiral planar inductors have a lower spiral coil and via increasing inductance in limited possession are and confirm the frequency characteristics. The structures of inductors have Si thickness of 300㎛, SiO 2 thickness of 7㎛. The width of Cu coils and the space between segments have 20㎛, respectively. The number of turns of coils have 3. The performance of spiral planar inductors was simulated to frequency characteristics for inductance, quality-factor, SRF(Self- Resonance Frequency) using HFSS. The 2-layer spiral planar inductors have inductance of 3.2nH over the frequency range of 0.8 to 1.8 GHz, quality-factor of maximum 8.2 at 2.5 GHz, SRF of 5.8 GHz. Otherwise, 1-layer spiral planar inductors have inductance of 1.5nH over the frequency range of 0.8 to 1.8 GHz, quality-factor of maximum 18 at 8 GHz, SRF of 19.2 GHz. Key Words : Spiral, Planar, Inductor, SRF, Quality-factor 이 논문은 10년도 남서울대학교 학술연구비 지원에 의해 연구되었음 . * 교신저자 : 김재욱(jwkim@nsu.ac.kr)접수일 11년 08월 11일 수정일 11년 08월 30일 게재확정일 11년 09월 08일