Development of a Compound Speckle Interferometer for Precision Three-Degree-of-Freedom Displacement Measurement

In this study, a compound speckle interferometer for measuring three-degree-of-freedom (3-DOF) displacement is proposed. The system, which combines heterodyne interferometry, speckle interferometry and beam splitting techniques, can perform precision 3-DOF displacement measurements, while still having the advantages of high resolution and a relatively simple configuration. The incorporation of speckle interferometry allows for non-contact displacement measurements by detecting the phase of the speckle interference pattern formed from the convergence of laser beams on the measured rough surface. Experiments were conducted to verify the measurement capabilities of the system, and the results show that the proposed system has excellent measurement capabilities suitable for future real-world applications.