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Organic metal ion beam production for stoichiometric crystalline film formation
Organic metal ion beam production for stoichiometric crystalline film formation
2019
Satoru Yoshimura
Satoshi Sugimoto
Takae Takeuchi
Kensuke Murai
Masato Kiuchi
Keywords:
Beam (structure)
Silicon carbide
Metal
Materials science
Stoichiometry
Silicon oxide
Ion beam
Chemical engineering
Correction
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