Micrometer Level Positioning Design

One of the actuators that possesses a relatively higher accuracy and a very smaller size is the piezoelectric actuator. Micro-level positioning designs of piezoelectric actuators have attracted the attention of researchers. However, performances of piezoelectric actuators are naturally affected by piezoelectric elements’ nonlinear hysteresis effect, modeling uncertainties of piezoelectric actuators, and external disturbances from the surrounding environment. To cancel the nonlinear effect and achieve precise positioning ability, a modelfree robust adaptive fuzzy controller is developed for piezoelectric actuators in this working paper. From the simulation results, a piezoelectric actuator with a micro-level positioning accuracy is accomplished based on our proposed method.