High precision and high speed cutting of 4 th generation OLED masks with LaserMicroJet

Tuan Anh Mai,Bernold Richerzhagen

High precision and high speed cutting of 4 th generation OLED masks with LaserMicroJet

2007

Tuan Anh Mai
Bernold Richerzhagen

A new micro-machining technology - the water jet guided laser, also called as LaserMicroJet® technology - has been developed for the manufacturing of sophisticated and heat sensitive OLED masks.

Keywords:

Physics
Optoelectronics
Fiber laser
Laser
Surface micromachining
Optics
Laser beam machining
OLED
heat sensitive
Laser cutting
Laser ablation

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