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Studies on Al 2 O 3 /ZrO 2 /Al 2 O 3 high K gate diele
Studies on Al 2 O 3 /ZrO 2 /Al 2 O 3 high K gate diele
2004
Chenglu Lin
Ninglin Zhang
Qinwo Shen
Keywords:
Cathode ray
Equivalent series resistance
High-κ dielectric
Metallurgy
Materials science
Silicon on insulator
Transmission electron microscopy
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