Adjusting with high positional resolution, even in the nano- or sub-nanometer range
2006
The invention relates to an adjustment device with high positional resolution, even in the nanometer or sub-nanometer range, and a travel of a few micrometers to several hundred millimeters, which operated for the main operating directions in the closed loop PZT solid-state actuators are used, their respective position by means of high-resolution sensors can be determined and continue to be the PZT solid-state actuators via joints with a platform in conjunction. additional actuators according to the invention provided on the basis of piezoelectric single crystals, which are driven according to the data stored in its error table values, wherein the respective control value is, however, obtained as a function of the main operating axes with opposite signs and the extra to compensate for vertical occurring to the respective actuating direction position errors actuators are connected via a correcting plate having the Verstelleinrichtungs platform.
Keywords:
- Correction
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