Effects of HfO$lt;inf$gt;2$lt;/inf$gt; Interlayer on Microstructure and Mechanical Property of Al$lt;inf$gt;2$lt;/inf$gt;O$lt;inf$gt;3$lt;/inf$gt; Thin Film on MgF$lt;inf$gt;2$lt;/inf$gt; Substrate
2016
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