Effect of Zn filler for percolative BaTiO3/Zn composite films fabricated by aerosol deposition

Abstract We fabricated percolative BaTiO 3 /Zn composite films on copper substrates using a variety of weight concentrations by aerosol deposition. The BaTiO 3 /Zn composite films were deposited in crystalline form, and no secondary phase in the composite film was observed. At the BaTiO 3 /Zn composite films, the Zn contents were measured as 0.78-41.62 vol% by X-ray fluorescence. Their dielectric constants indicated from 62.5 to 367.8 in the case of 0.78-11.8 vol% at 1 kHz. The percolation threshold ( f c ) of BaTiO 3 /Zn composite films is 11.8 vol%, and those critical exponent ( q ) are 0.54, respectively. Therefore, the composite film having Zn content below 11.8 vol% can be used as embedded capacitor.