High-Performance 18-GHz Microwave Readout Flexured Mass Accelerometer
1999
A 10 8 dynamic range Flexured Mass Accelerometer
utilizing microwave cavities and readout electronics
operating at 18 GHz has been shown to be capable of
achieving 1-µg bias stability with +0.01°C temperature
control. Developments previously reported for the device
operating at 10 GHz .1 were implemented. The flexure
cartridge, designed to eliminate anelastic and hysteretic
effects during device static or tumble testing, was
incorporated into the 18-GHz device. Two device
configurations were fabricated and tested for resolution,
drift stability, and tumble bias repeatability in a 1-g field.
One was constructed entirely from Superinvar, save for
the ceramic flexure cartridge, while the other, which also
used a similar ceramic flexure cartridge, was of a hybrid
construction employing Superinvar microwave cavities
and a ceramic Zerodur housing. Two breadboard
configurations of low-noise 18-GHz electronics were
designed, built, and tested successfully to support these
evaluations. The best results achieved included the
following: resolution, 0.35 µg; drift stability with a rigid
insert substituted for the flexured proof mass, <8 µg rms
over 2 h; drift stability with the flexured proof mass in a
1-g field, 11.9 µg rms over 2 h; and 1-g tumble bias
repeatability over 5 cycles in 10 min, 2.64 µg rms,
measured for a single cavity, with no common mode
compensation.
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