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29pm2-F-4 Stabilization of 3-axis Accelerometer Properties Using Stretchable Beam Structure
29pm2-F-4 Stabilization of 3-axis Accelerometer Properties Using Stretchable Beam Structure
2015
Atsushi Kazama
Takanori Aono
Ryoji Okada
Keywords:
Beam (structure)
Accelerometer
Electronic engineering
Materials science
Optoelectronics
Structural engineering
Correction
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