Synthesis and estimation of Nb - N multilayers (N = Al, Au)

Multilayers made of superconducting thin film (S) and normal metal thin film (N) can be applied to various superconducting devices such as a multilayered Josephson junction. In this paper, S - N metallic multilayers were synthesized by using off-axial DC magnetron sputtering apparatus. Structures of S - N multilayer samples such as Nb - Al - Si were analysed by use of the Auger electron spectroscopy. X-ray photoelectron spectroscopy and x-ray diffraction analyses of the interface were also carried out.