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Ion Beam Devices for Material Processing and Analysis
Ion Beam Devices for Material Processing and Analysis
2008
F. Rüdenauer
H.W.P. Koops
G. Hobler
L. Palmetshofer
H. Bluhm
Keywords:
Ion beam
Focused ion beam
Analytical chemistry
Phase-shift mask
Materials science
Optoelectronics
materials processing
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