A BAYESIAN INDICATOR FOR RUN-TO-RUN PERFORMANCE ASSESSMENT USING INDUSTRAIL RISK

This paper proposes a performance indicator based on the Bayesian theory. This indicator is used for assessing the performances of Run-to-Run controllers. The indicator is calculated by analyzing four main points: the output/target error, the output dispersion, the out of tolerance (oot) rate and the industrial risk. The proposed Bayesian method has been tested on the Run-to-Run loops of a semiconductor manufacturing foundry.