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302 繰り返し荷重によるシリコンの疲労損傷集積の観察(OS3-1 MEMSと先進材料(1),OS3 MEMSと先進材料)
302 繰り返し荷重によるシリコンの疲労損傷集積の観察(OS3-1 MEMSと先進材料(1),OS3 MEMSと先進材料)
2014
hayato izumi
tosifumi kita
kentarou tanaka
syouzi kamiya
Keywords:
Compressive strength
Microelectromechanical systems
Structural engineering
Materials science
Silicon
Engineering physics
Correction
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