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電子サイクロトロン共鳴(ECR)スパッタ法を用いた高品質薄膜形成
電子サイクロトロン共鳴(ECR)スパッタ法を用いた高品質薄膜形成
2002
sigeru kouya
keisei amasawa
Keywords:
Dielectric strength
Electron cyclotron resonance
Carbon film
Analytical chemistry
Electrical resistivity and conductivity
Nuclear magnetic resonance
Materials science
Optoelectronics
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