Effect of Carbon Contamination on Microdefect Formation in SIMOX

L. Jastrzebski,J.F. Corboy,C. W. Magee,J.H. Thomas,A.C. Ipri,D. Peters,G.W. Cullen,H Friedman

Effect of Carbon Contamination on Microdefect Formation in SIMOX

1988

L. Jastrzebski
J.F. Corboy
C. W. Magee
J.H. Thomas
A.C. Ipri
D. Peters
G.W. Cullen
H Friedman

Pendant le recuit suivant l'implantation, precipitation du carbone entrainant la formation de microdefauts. Attaque, par gravure au plasma de la surface afin d'eliminer les impuretes de carbone

Keywords:

Ion implantation
Thin film
Secondary ion mass spectrometry
Impurity
Plasma
Analytical chemistry
Inorganic chemistry
Plasma etching
Carbon
Silicon
Chemistry
carbon contamination

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