A helium mass spectrometry pressed integral leak detection technique for ultra-high vacuum devices

Based on multi-weld seam of image intensifier tube, we have designed the leak detection platform for high vacuum electron devices, the experimental result show that Helium injection method’s minimum leakage rate is 10 -11 Pa·m 3 /s, and pressed integration method’s minimum leakage rate less than 10 -11 Pa·m 3 /s, and it is of positive significance to improve the life of the device.