Improving Seebeck coefficient of ITO/AZO transparent film thermocouple by ITO (100) preferred orientation

Abstract ITO/AZO transparent film thermocouple was fabricated by the direct current pulsed magnetron sputtering technique. ITO (100) facet displayed the maximum work function. And ITO film with (100) preferred orientation displayed the higher carries mobility. So, the Seebeck coefficient of ITO/AZO transparent film thermocouple reached the maximum 43.16 ± 0.58 μV/K, which consisted of ITO film with (100) preferred orientation. On the contrary, the work function of ITO film without preferred orientation was the mixture of many ITO facets, which resulted in the Seebeck coefficient of ITO/AZO transparent film thermocouple was only 5.96 ± 0.36 μV/K. Finally, in order to improve the Seebeck coefficient of ITO/AZO transparent film thermocouple, it is necessary for ITO film with (100) preferred orientation.