Coating Composition Evolution during the Deposition of Al and N from Plasma on a Cylindrical Substrate

This paper presents the results of the numerical study of the coating composition evolution deposited on a cylindrical specimen from plasma containing aluminum and nitrogen. Calculations were based on a coupling model, which accounted for various transfer mechanisms and staged chemical reactions in the coating and in the transient zone. The evolution of the coating composition is connected with transfer processes, chemical reactions, and with the change of effective properties.