Comparison of the surface structure of carbon films deposited by different methods

Abstract Atomic force microscopy is used to estimate and compare surface morphology of the carbon coatings, prepared using radio frequency plasma chemical vapor deposition, pulsed cathodic are discharge, ion-beam deposition and hot-filament chemical vapor deposition. The difference in the surface structure was mentioned for each method of deposition. The influence of the surface morphology on the film properties is discussed.