Semiconductor device with shielding structure
2013
The invention discloses a semiconductor device with a shielding structure. The semiconductor device with the shielding structure comprises a substrate, a radio frequency circuit, the shielding structure and a metal interconnector system, wherein the substrate comprises an active surface and a back surface, the radio frequency circuit is arranged on one side of the active surface of the substrate, the shielding structure is at least arranged in the substrate, surrounds the radio frequency circuit and is grounded, and the shielding structure comprises a shielding silicon-penetrating electrode not penetrating through the substrate; the metal interconnector system is arranged on one side of the active surface of the substrate and comprises a connecting circuit, and the connecting circuit connects potential signals to the radio frequency circuit.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI