The charged particle beam device and a method for manufacturing a sample

The present invention provides a charged particle beam apparatus, comprising: a charged particle source; that the charged particle source emitted from a charged particle beam an objective lens focused on the specimen; emitted from the sample detector detects secondary charged particles; can be contacting the sample with the probe; emitted to the sample gas, the conductive gas jet; and driving the probe and the gas discharged from the gas nozzle a control unit controlling, in the control unit to irradiate the charged particle beam and specimen processing after the sample prior to contacting the probe with the sample, the gas discharged from the gas nozzle toward the processing position, and irradiating the charged particle beam to form a conductive film in the sample processing unit, and includes a determination process is formed on the conductive portion detecting the contact portion in contact with the probe of the membrane.